发明名称 Droplet ejecting apparatus
摘要 A droplet ejecting apparatus includes: droplet quantity evaluation means, wherein the mass of a droplet ejected onto an article is measured, and a measurement signal is generated based on the measurement result; feedback control means, wherein said measurement signal is compared with a respective reference value and then a control signal is generated based on the result of comparison; and droplet ejecting means for adjusting the amount of ejection for the droplet on the basis of said control signal. In the apparatus, the amount of droplets ejected from a droplet ejecting means can be accurately determined in real time, and the variation in the amount of ejected droplets, the presence thereof and the deviation of the arrival position thereof can also be determined.
申请公布号 US2002096577(A1) 申请公布日期 2002.07.25
申请号 US20010057749 申请日期 2001.10.25
申请人 NGK INSULATORS, LTD. 发明人 TAKEUCHI YUKIHISA;KIMURA KOJI;YAMAMOTO KAZUHIRO
分类号 G01G3/16;B01F3/08;B01F5/20;B01L3/02;B05B12/08;B05B17/06;B05C5/02;B05C11/10;B41J2/125;G01B17/00;G01G17/04;G01N35/10;(IPC1-7):B05B1/08 主分类号 G01G3/16
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