发明名称 SLICING MACHINE
摘要 PURPOSE:To improve the operating efficiency of a machine by a method wherein a wall part which separates the inner peripheral surface of the fitting hole of a chuck body from a hydraulic chamber, or the outer peripheral surface of the fitting shaft at the tip of a main shaft from the hydraulic chamber is elastically deformed by feeding working fluid to the hydraulic chamber, which is formed inside the chuck body or in the interior of the fitting shaft at the tip of the main shaft. CONSTITUTION:A chuck body 13 consists of a chuck main body 19 and a fitting part 21, within which a hydraulic chamber 25 surrounding round a center axis X is formed near the inner peripheral surface 23A of a fitting hole. When the working fluid in a cylinder chamber 27 is fed to the hydraulic chamber 25 by screwing in the actuating screw of a working fluid feeding means, the inner peripheral surface 23A of the fitting hole 23 is shrunk to the radial direction of the center axis X of the chuck body 13 equi-directionally. Thus, through the pressing of the outer peripheral surface 24 A of the fitting shaft 24 by the diametrically shrinking inner peripheral surface 23A of the fitting hole 23, the chuck body 13 is fixed to the tip part 12 of the main shaft 11, resulting in coinciding the center axis 11 of the chuck body 13 with the center axis of the fitting shaft 24 or the axis line O of the main shaft 11 so as to also center an inner diameter saw blade 14.
申请公布号 JPH07329053(A) 申请公布日期 1995.12.19
申请号 JP19940125581 申请日期 1994.06.07
申请人 MITSUBISHI MATERIALS CORP;MITSUBISHI MATERIALS SHILICON CORP 发明人 INOUE MASAYUKI;HISHIDA YUKITOSHI;TSURUTA SHOJI;MATSUMOTO TATSUMI
分类号 B24B45/00;B23D61/10;B24B27/06;B28D5/02;H01L21/304;(IPC1-7):B28D5/02 主分类号 B24B45/00
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