| 摘要 |
A method for cleaning a capillary tube for use in a wire bonding tool includes the step of applying an ultrasonic wave to the capillary tube, with the tip of the capillary tube being immersed in a cleaning solution, and with a tungsten wire being inserted in the capillary tube. Before the cleaning step, the capillary tube is ground by an abrasive sheet, with the capillary tube being empty.
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