SHOWER HEAD AND EQUIPMENT FOR FABRICATING THIN FILM INCLUDING SUCH SHOWER HEAD

摘要

PURPOSE: A shower head is provided to effectively cool the lowermost plate of a shower heat unit and to minimize variation of temperature in the lowermost plate, by installing a cooling unit having a simple structure in the lowermost plate of the shower heat unit. CONSTITUTION: A gas path for supplying reaction gas is formed in a plurality of plates. A plurality of coolant introducing units and a plurality of coolant exhausting units are installed in the lowermost plate(350) confronting the wafer(100), independent of each other. One of the coolant introducing units and one of the coolant exhausting units are interconnected to each other in the lowermost plate, including a plurality of independent inner cooling lines(450).