发明名称 SYSTEM FOR FORMING BUMPS ON WAFERS
摘要 A system and method for forming bumps on an integrated circuit including a scanning direct laser imager employed to selectably expose a photosensitive layer deposited on an integrated circuit substrate, thereby to define regions overlying selected portions of the substrate, a developer developing said photosensitive layer to form apertures in the photosensitive layer at the defined regions, and a solder applicator applying a solder composition to the apertures to define solder bumps on the integrated circuit at selected portions thereof.
申请公布号 US2002096555(A1) 申请公布日期 2002.07.25
申请号 US20010767645 申请日期 2001.01.23
申请人 ORBOTECH LTD. 发明人 WAXLER SCOTT STEVEN;ZEMER DAN
分类号 B23K1/005;H01L21/60;(IPC1-7):B23K31/02;B23K1/08 主分类号 B23K1/005
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