发明名称 |
PLASMA DEVICE AND PLASMA GENERATING METHOD |
摘要 |
A desired component in an electromagnetic field inside a slot antenna is selectively extracted and supplied into a container where it is used for plasma generating. An inclination angle of a slot (36) with respect to the peripheral direction of the radiation surface (31) of the slot antenna (30) gradually decreases from the center portion (O) toward the peripheral edge portion of the radiation surface (31).
|
申请公布号 |
WO02058124(A1) |
申请公布日期 |
2002.07.25 |
申请号 |
WO2002JP00301 |
申请日期 |
2002.01.18 |
申请人 |
TOKYO ELECTRON LIMITED;ISHII, NOBUO;ANDO, MAKOTO |
发明人 |
ISHII, NOBUO;ANDO, MAKOTO |
分类号 |
H01J37/32;(IPC1-7):H01L21/306 |
主分类号 |
H01J37/32 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|