发明名称 REDUCED ASPECT RATIO DIGIT LINE CONTACT PROCESS FLOW USED DURING THE FORMATION OF A SEMICONDUCTOR DRAM DEVICE
摘要 <p>A method used during the formation of a semiconductor device comprises forming a first portion of a digit line contact plug before forming storage capacitors. Subsequent to forming storage capacitors, a second portion of the digit line plug is formed to contact the first portion, then the digit line runner is formed to contact the second plug portion. A structure resulting from the process is also described.</p>
申请公布号 WO2002058109(A2) 申请公布日期 2002.07.25
申请号 US2002001001 申请日期 2002.01.15
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