| 摘要 |
<p>The invention relates to a method for manufacturing a waveguide component with several layers stacked on a silicon substrate. Said component comprises a buffer layer (2) which is positioned on said substrate (1), a guiding layer (3) which is positioned on the buffer layer and which is used to produce a waveguide device (6), and an outer layer (5) used as protection against external stresses. The layers are made from an organic-inorganic hybrid using the sol-gel process. The inventive method is characterised in that an additional layer (4) is disposed on top of the guiding layer (3) in such a way that a symmetrical structure is obtained having the same refractive index around the waveguide device produced in the guiding layer (3). The invention can be used to produce a waveguide component.</p> |
