DIRECT DETECTION OF LOW-ENERGY CHARGED PARTICLES USING METAL OXIDE SEMICONDUCTOR CIRCUITRY
摘要
An electronic ion detection system which may detect low-energy charge particles such as ions from, for example, a mass spectrometer system. The capacitive sensors are located with two plates which are separated by an insulator. The ions which impinge on one of the plates cause charge to be created. That charge may be amplified and then handled by a charge mode amplifier such as a CCD sensor. That CCD sensor may operate using fill and spill operations.
申请公布号
WO02058105(A2)
申请公布日期
2002.07.25
申请号
WO2002US00763
申请日期
2002.01.11
申请人
CALIFORNIA INSTITUTE OF TECHNOLOGY;SINHA, MAHADEVA, P.;WADSWORTH, MARK, V.