Optical device provided with a resin thin film having a micro-asperity pattern and manufacturing method and apparatus of the optical device

摘要

A cylindrical embossment roll whose outer circumferential surface is formed with a micro-asperity pattern is prepared. A substrate is coated with a thin resin film. The substrate is held by a transfer stage, and a micro-asperity pattern is formed on the thin resin film by pressing the outer circumferential surface of the embossment roll against the thin resin film with a pressurizing mechanism while rolling the embossment roll on the thin resin film.