| 摘要 |
PURPOSE: To reduce the size while increasing the capacity by composing a thin dielectric film of barium titanate having specified mean crystal grain size. CONSTITUTION: A thin dielectric film 4 is composed of barium titanate (BaTiO3 ) having mean crystal grain size of 0.15-0.25μm. The thin dielectric film 4 is formed by sol-gel method and fired at about 950 deg.C. The BaTiO3 is a cubic crystal. Oriented platinum (Pt) thin films 2, 3 are employed as electrodes sandwiching the thin dielectric film 4. This structure accelerates thinning of dielectric film thus realizing a miniature ceramic capacitor having relatively high dielectric constant in which the temperature variation rate of capacitance is suppressed.
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