METHOD AND SYSTEM FOR THE EXAMINATION OF SPECIMEN USING A CHARGED PARTICLE BEAM,申请号KR1020027007587-传众专利搜索

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发明名称	METHOD AND SYSTEM FOR THE EXAMINATION OF SPECIMEN USING A CHARGED PARTICLE BEAM
摘要
申请公布号	KR20020061641(A)	申请公布日期	2002.07.24
申请号	KR1020027007587	申请日期	2002.06.14
申请人		发明人
分类号	H01J37/28	主分类号	H01J37/28
代理机构		代理人
主权项
地址

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