Lithographic apparatus and device manufacturing method

摘要

Vibrational movement between the top of a lens (11) and a main plate (12) on which the lens is mounted is reduced by attaching between the lens and the main plate a lens support (120) which detects relative movement between the lens and the main plates using piezoelectric sensors (40) and compensates for that movement to reduce vibration using piezoelectric actuators (30) which are in series with the piezoelectric sensors. The control signal which is generated to actuate the actuated piezoelectrics is generated by a controller. <IMAGE>