Tubular target and method for its production

摘要

Tubular target (1) comprises a tubular sputtering material (3) and a supporting tube. The sputtering material has a circular cross-section and concentrically surrounds the tube. The tube protrudes from the sputtering material at the connection to a cathode sputtering device on one end of the target. The part of the supporting tube protruding from the sputtering material is an individual part (2a) attached by a screw. An Independent claim is also included for a process for the manufacture of a tubular target. Preferred Features: The screw is formed from an O-ring seal (5) between a first chamber outside of the target and a second chamber within the target. The sputtering material is made from Ag, Au, Zn, Al, Cu, Nb, Ni, Cu or their alloys; or is made from Si, Sn, In, Bi or their alloys; or is made from ZnO, TIO2 or In-Zn oxide.