| 摘要 |
<p>In an alignment apparatus for moving an X-Y stage (1) to a target position by a motor (2), a laser interferometer (6) measures the position of the X-Y stage (1), and supplies position information P(x, y) to a subtracter (5) and a gain setter (8). The gain setter (8) sets a transfer function Gxy(s) of a compensator (4) on the basis of the position information P(x, y), and the compensator (4) amplifies a deviation S with the set transfer function Gxy(s) to control a driver (3). <IMAGE></p> |
