发明名称 SUBSTRATE TREATMENT DEVICE
摘要 <p>A device for the treatment of substrates has a fluid container filled with a treatment fluid and at least one substrate receiving device. A lifting device is provided for lifting and lowering the at least one substrate receiving device out of and into the treatment fluid. The lifting device is arranged laterally at the container and has parts that are positioned above the container and the treatment fluid. A vapor suction device with a suction channel is provided for exhaustion of vapors in an area in which parts of the at least one lifting device are located above the treatment fluid. In the area above the treatment fluid, a plate is provided having an opening to which the suction channel is connected.</p>
申请公布号 EP0946971(B1) 申请公布日期 2002.07.24
申请号 EP19970910406 申请日期 1997.10.01
申请人 STEAG MICROTECH GMBH 发明人 WEBER, MARTIN
分类号 B08B3/04;B65G49/02;C23G3/00;H01L21/00;H01L21/304;H01L21/677;(IPC1-7):H01L21/00 主分类号 B08B3/04
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