发明名称 Method for producing organic insulating film
摘要 A method for producing an organic insulating film comprising the steps ofcoating a solution containing a dissolved organic resin having a structure of the following formula (1) on a substrate, andexposing the coated substrate at a temperature of 200° C. or more under an atmosphere of an oxygen partial pressure of 0.01 atm or less,wherein each of R1 to R8 is independently selected from the group consisting of a hydrogen atom, fluorine atom, chlorine atom, bromine atom and iodine atom, alkyl groups having 1 to 10 carbon atoms, functional groups containing a double bond having 2 to 10 carbon atoms, functional groups containing a triple bond having 2 to 10 carbon atoms, a methoxy group, ethoxy group and propoxy group.
申请公布号 US6423377(B2) 申请公布日期 2002.07.23
申请号 US20010793095 申请日期 2001.02.27
申请人 SUMITOMO CHEMICAL COMPANY, LIMITED 发明人 YOSHIDA YUJI
分类号 B05D5/12;B05D3/02;B05D3/04;C08J5/18;H01L21/312;(IPC1-7):B05D3/07 主分类号 B05D5/12
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