Apparatus for observing interior from an ultramicropore space

摘要

An apparatus for an object in an ultramicropore space has a lens system so that an incidence point P with the diameter in a range from 0.3 to 0.7 mm comes to a position in a range of 12 to 17 mm away from the front side of an object lens 30. At the same time a reflection mirror 15 is positioned with a reflection mirror mounting member 8 formed with the V-shaped form in front of the object lens 30 and a reflection mirror holding frame 8 at the position of the incidence point. This arrangement is useful fir example to observe a soldered section 52 of an IC chip 50 by inserting this reflection mirror 15 into the ultramicropore space.