ULTRAPURE WATER MAKING METHOD AND ULTRAPURE WATER MAKING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an ultrapure water making apparatus which is capable of stably and inexpensively supplying ultrapure water of <=0.5 ppm in total organic acid carbon(TOC) and <=1 ppm in dissolved oxygen(DO) concentration and a method of making this ultrapure water. SOLUTION: This ultrapure water making apparatus consists of a pretreatment system, a primary pure water system and a polishing system and has at least a UV oxidation apparatus and an ion exchange apparatus arranged behind this UV oxidation apparatus. An organic matter adsorption apparatus packed with organic matter adsorption compounds consisting of pyrolysis products of sulfonated vinyl aromatic polymers in a macronetwork form of at least 85% in carbon content and 1.5:1 to 20:1 in atomic ratio of carbon and hydrogen is arranged in the flow passage from the UV oxidation apparatus to the ion exchange apparatus. The matter adsorption compounds can be regenerated up to the level at which the equivalent effect is obtainable by regeneration operation.