| 摘要 |
The invention relates to an elementary standard structure for the determining of the RF characteristics of an RF integrated circuit probe, comprising at least two contact pads deposited on a silicon substrate by means of an electrically insulating layer, at least one standard load that is measurable from the contact pads and a conductive screen buried beneath the insulating layer. The invention relates also to a standard circuit comprising a plurality of elementary standard structures arranged so as to present contact pads corresponding by their location to RF connection pads of the integrated circuit to be tested.
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