Slurry useful for wire-saw slicing and evaluation of slurry

摘要

Slurry useful for wire-saw slicing has viscosity adjusted to 400-700 mPa.second at a shear speed of 2/second and of 50-300 mPa.second at a shear speed of 380/second. The viscosity of slurry is measured using a cone and plate type viscometer which can measure viscosity at different shear speeds. Since the slurry sufficiently flows into inner parts of grooves formed in an ingot and consumed for wire-saw slicing due to the viscosity controlled in response to the shear speed, the ingot can be efficiently sliced to wafers or discs.