| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a device and a method for a laser beam machining by which a striped irregularity of lower order generated in the laser beam machining is suppressed. SOLUTION: The device is provided with a laser oscillator 1 which generates an ultraviolet laser beam L having a short wavelength, a reflection mirror 5 having the Brewster's angle which extracts the transverse polarized component LH of the ultraviolet laser beam L having a short wavelength outputted from the laser oscillator 1, optical lens systems 2 and 3 which condense the transverse polarized component LH of the ultraviolet laser beam L extracted by the reflection mirror 5 having the Brewster's angle upon the plane to be machined of the work to be machined, and an X-Y table 6 which moves the work so that the plane to be machined is scanned with the transverse polarized component LH of the ultraviolet laser beam L passed through the optical systems 2 and 3.</p> |
