| 摘要 |
PROBLEM TO BE SOLVED: To provide a box structure for heat treatment equipment which is easy to mount heat insulating materials and can obtain excellent heat insulating effects. SOLUTION: Panels 41 to 45 are placed via a heat insulating material 5 on external surfaces of an inner vessel 3 in which heat treatment is to be performed, and the panels 41 to 45 are fixed to one another to provide an outer vessel 4. An outer vessel cover 6 (61 and 62) is also mounted on an external surface of the outer vessel 4 with a gap.
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