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发明名称
Apparatus for transferring a substantially circular article
摘要
申请公布号
EP0778610(B1)
申请公布日期
2002.07.17
申请号
EP19960203122
申请日期
1996.11.07
申请人
ASM INTERNATIONAL N.V.
发明人
ZINGER, JAN;HAANSTRA, KORNELIUS;SCHIMMEL, RUDI
分类号
B25J9/06;B65G49/07;H01L21/677;H01L21/68;(IPC1-7):H01L21/00
主分类号
B25J9/06
代理机构
代理人
主权项
地址
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