Ion accelaration method and apparatus in an ion implantation system,申请号AU20020216269-传众专利搜索

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发明名称	Ion accelaration method and apparatus in an ion implantation system
摘要
申请公布号	AU2002216269(A1)	申请公布日期	2002.07.16
申请号	AU20020216269	申请日期	2001.12.27
申请人	AXCELIS TECHNOLOGIES, INC.	发明人	WILLIAM FRANK DIVERGILIO;DAVID D. SWENSON;KOUROSH SAADATMAND
分类号	C23C14/48;H01J37/317;H01L21/265;H05H9/00;(IPC1-7):H01J37/30	主分类号	C23C14/48
代理机构		代理人
主权项
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