发明名称 Method for extracting process determinant conditions from a plurality of process signals
摘要 A system and method for identifying events in a manufacturing process from a sequence of m-dimensional input data signals, m>=2 obtained from monitoring of the manufacturing process utilizing a data processor for transforming each m-dimensional input data signal to a set of output data signals based on an orthogonal polynomial transform function, wherein the input data signals are used as coefficients in evaluating the polynomial transform functions. The data processor also integrates the transform function within the defined limits of the transform function to determine a scalar value as a function of time. A display system may be used to display a graph of the scalar values as a function of time for visually identifying events or the processor may identify events based on detected scalar values. The transform function may be Fourier, Chebyshev, Legendre or other polynomial type function.
申请公布号 US6420194(B1) 申请公布日期 2002.07.16
申请号 US20000616120 申请日期 2000.07.14
申请人 LUCENT TECHNOLOGIES INC. 发明人 REITMAN EDWARD ALOIS
分类号 H01L21/00;H01L21/66;H01L21/683;(IPC1-7):H01L21/00 主分类号 H01L21/00
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