发明名称 |
Image position and lens field control in electron beam systems |
摘要 |
A charged particle beam system with a source of charged particles produces a beam directed along a path. A given electromagnetic lens is located along the path. The given electromagnetic lens is adapted to produce a first field directed with a first orientation adapted for affecting a beam of charged particles directed along the path through the lens. A bucking electromagnetic lens is juxtaposed with the given electromagnetic lens adapted to produce a bucking field directed with a bucking orientation adapted for affecting the beam of charged particles directed along the path. The bucking field has an orientation opposing the first field. A fringe field from the bucking electromagnetic lens produces a nulling field to compensate for aberrations and/or beam disturbances.
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申请公布号 |
US6420713(B1) |
申请公布日期 |
2002.07.16 |
申请号 |
US19990301000 |
申请日期 |
1999.04.28 |
申请人 |
NIKON CORPORATION |
发明人 |
STICKEL WERNER;GOLLADAY STEVEN DOUGLAS |
分类号 |
G03F7/20;H01J37/141;H01J37/153;H01J37/30;H01L21/027;(IPC1-7):H01J37/141 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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