TITANIUM OXIDE LAYER AND REFLECTION PREVENTING FILM EMPLOYING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a titanium oxide layer capable of reducing an internal stress of the same and permitting to obtain a desired value of refractive index while excellent in resistance to moisture also. SOLUTION: The titanium oxide layer is formed of organic titanium compound and the refractive index of the titanium oxide layer is specified so as to be 1.7-2.9 (λ=550 nm), while the internal stress of the same is specified so as to be 1 GPa or less and the extinction coefficient of the same is specified so as to be 0.01 (λ=436 nm) or less.