| 摘要 |
A reliable, modular, production quality narrow-band KrF excimer laser capable of producing 10 mJ laser pulses at 1000 Hz with a bandwith of about 0.6 pm or less. The present invention is especially suited to long-term round-the-clock operation in the lithographic production of integrated circuits. Improvements over prior art lasers include a single upstream preionizer tube (56) and acoustic baffles. A preferred embodiment includes reduced fluorine concentration, an anode support bar shaped to reduce aerodynamic reaction forces on blower bearings, a modified pulse power system providing faster pulse rise time, an output coupler (65) with substantially increased reflectivity, a line narrowing module with CaF prism beam expanders, a more accurate wavemeter, a laser computer controller programmed with new and improved pulse energy control algorithm.
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| 申请人 |
CYMER, INC.;KNOWLES, DAVID, S.;AZZOLA, JAMES, H.;BESAUCELE, HERVE, A.;DAS, PALASH, P.;ERSHOV, ALEXANDER I.;JUHASZ, TIBOR;NESS, RICHARD, M.;OZARSKI, ROBERT, G.;PARTLO, WILLIAM, N.;ROTHWEIL, DANIEL, A.;SANDSTROM, RICHARD, L.;UJAZDOWSKI, RICHARD, C.;WATSON, TOM, A.;FOMENKOV, IGOR, V. |
发明人 |
KNOWLES, DAVID, S.;AZZOLA, JAMES, H.;BESAUCELE, HERVE, A.;DAS, PALASH, P.;ERSHOV, ALEXANDER I.;JUHASZ, TIBOR;NESS, RICHARD, M.;OZARSKI, ROBERT, G.;PARTLO, WILLIAM, N.;ROTHWEIL, DANIEL, A.;SANDSTROM, RICHARD, L.;UJAZDOWSKI, RICHARD, C.;WATSON, TOM, A.;FOMENKOV, IGOR, V. |
