WORKPIECE HOLDING RING FOR POLISHING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a workpiece holding ring for polishing devices, which is excellent in toughness and wear resistance using polyarylene sulfide resin. SOLUTION: This workpiece holding ring for polishing devices is made of polyarylene sulfide resin. Its fracture toughness value K1C is 2.2 MPa.m1/2 or more, and its crystallinity is 18% or more.