发明名称 Methods for creating elements of predetermined shape and apparatuses using these elements
摘要 Methods for forming elements having a predetermined shape and for assembling the elements. In one example of a method, each of the elements includes a functional component which is disposed on a first face of a first substrate. A layer representing a first portion of the first substrate at a second face of the first substrate is removed, leaving a second portion of the first substrate on the first substrate. The second portion is etched through a first patterned mask on a surface of the second portion. The plurality of elements is then released from the first substrate. The plurality of elements may then be combined with a fluid to form a slurry. In another example of a method, the first face is etched vertically in regions adjacent to the edges of the plurality of elements, and regions below the first face are etched laterally, and then the plurality of elements are released from the substrate. Other methods of creating elements having a predetermined shape are described, and methods of using and/or assembling these elements are also described.
申请公布号 US6420266(B1) 申请公布日期 2002.07.16
申请号 US19990433605 申请日期 1999.11.02
申请人 ALIEN TECHNOLOGY CORPORATION 发明人 SMITH JOHN STEPHEN;HADLEY MARK A.;TU JAY
分类号 H01L21/302;H01L21/68;H01L21/76;H01L21/78;H01L27/15;(IPC1-7):H07L21/306 主分类号 H01L21/302
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