| 摘要 |
PURPOSE: An anodization reactor and a unit of the same are provided to improve the production yield rate by simultaneously anodizing many substrates and to prevent the malfunction of the anodizer previously. CONSTITUTION: The anodizer includes an anodizing reaction bath(20) filling with the electrolyte(29), a metal mesh(23) installing to the reaction bath and applying the negative voltage, and a unit reactor(30) sinking into the electrolyte, fixing the anodizing target and applying the positive voltage. The mesh divides the electrolyte into a plurality of small electrolyte region by installing into the anodizing reaction bath. The unit reactors are respectively sunk into the small electrolyte region. The unit reactor includes a conductive material, an electrode connecting one end to the conductive material and installing to the target, the first cover surrounding the conductive material and having a gas inlet and a gas inlet path, and the second cover surrounding the target and the electrode in order to expose one surface of the target.
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