| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem of deteriorated throughput due to crosstalk noise generated by an electrostatic deflector via the capacitance between deflecting electrodes, the problem of unexpected deflection effects, and that of drawing not being made until the noise is reduced. SOLUTION: A shield electrode 12 at the ground potential is inserted into the gap between the concentrically and adjacently arranged deflecting electrodes 13. The output of a deflection control circuit 2 is connected to each deflecting electrode 13 by a shield wire where at least one side of a shield is set to the ground. By inserting the shield electrode 12, the crosstalk noise can be reduced between the deflecting electrodes 13, thus eliminating the need for waiting for drawing until noise is reduced, and hence increasing the speed of the throughput.
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