摘要 |
PROBLEM TO BE SOLVED: To provide an ion source permitting to extract of a heavy a current beam and having stable operation with high reliability. SOLUTION: The negative ion source comprises discharge containers for generating a discharge plasma, a filament arranged on the wall faces of the discharge containers, an arc discharge power supply for generating the discharge plasma in the discharge containers, a plurality of magnet lines arranged on the outer walls of the discharge container in parallel to each other and magnetized perpendicularly to the wall faces thereof with adjacent magnetic poles differentiated, extraction electrodes so provided as to block the discharge containers for extracting negative ions from the discharge plasma in the discharge containers, and means for forming a magnetic filter in an area between the discharge container and the extraction electrode for trapping electrons in the discharge plasma. The discharge containers are formed in plurality isolated from one another and the magnetic filter is formed in single which the plurality of the discharge containers share with each other, thereby permitting stable and great power discharge in the discharge containers and the extracting of a large-area heavy-current beam.
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