| 摘要 |
<p>PURPOSE: A method for forming a back surface electrode part of a solar cell is provided to improve performance of the solar cell by performing a preventing function for metal diffusion and a back surface reflection function, simultaneously. CONSTITUTION: A back surface field part(23) of a solar cell is formed on a back surface of the first conductive type silicon layer(22). A front surface electrode part(21) is formed on a front surface of the first conductive type silicon layer(22). An intermediate layer(24) is formed on the back surface field part(23). The intermediate layer(24) is formed by silicide or nitride. The silicide is formed by a PVD(Physical Vapor Deposition) method and a CVD(Chemical Vapor Deposition) method. A metal layer(25) is formed on the intermediate layer(24) by using the PVD method, a plating method, or a screen printing method. The metal layer(25) is formed with metals such as Cu, W, Fe, Al, C, Ag, Ni, or Ti.</p> |
