| 摘要 |
PURPOSE: A cooling water circulation detecting device is provided to prevent a process error due to an abnormal flow of a cooling water by respectively installing flow detecting sensors on exhaust pipes connected each chamber. CONSTITUTION: A cooling water circulation detecting device comprises the first chamber(30), the second chamber(40), the first and the second cathodes(30a,40a) respectively formed in the first and second chambers(30,40) for generating a plasma state gas by supplying free electrons to a supply gas through a high frequency voltage, a heat exchanging part(50) supplying a cooling water to the first and second cathodes(30a,40a), a multi-supply connection pipe(100) supplying the cooling water through supply pipes(150), another multi-supply connection pipe(200) receiving the cooling water through exhaust pipes(250), flow detecting sensors(70) respectively connected on the exhaust pipes(250), a decision part(300) deciding an error according to sensor signals and a warning part(350).
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