摘要 |
<p>PROBLEM TO BE SOLVED: To solve the problem that, in a thin-film crystalline silicon solar cell, its characteristics is lowered by a short circuit or the like due to convexo-concave parts, that its light confinement effect cannot be obtained, and that its short-circuit current density is low. SOLUTION: In the thin-film crystalline silicon solar cell, an electrode layer 1c on one side to be used as a rear electrode, silicon semiconductor films 1e to 1g having a semiconductor junction in which at least the part of an optically active layer 1f is formed of crystalline silicone, and an electrode layer 1h on the other side to be used as a surface electrode, are laminated and installed on a substrate 1a. The surface of the substrate 1a on the side forming the semiconductor films 1e to 1g has an convexo-concave structure 1b, and a curve which connects tops of its convex parts is formed in a curved concave shape. The surface on the light incident side of the semiconductor film 1f has a convexo-concave structure whose pitch corresponds to the pitch of the structure 1b on the surface of the substrate 1a. The surface of the semiconductor film 1f is formed as a fine convexo-concave structure whose difference of elevation is smaller than the difference of elevation of the convexo-concave structure of the semiconductor film 1f, and whose pitch is smaller than the pitch of the convexo- concave structure of the semiconductor film 1f.</p> |