| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an optical-to-electrical transducer element whose efficiency can be enhanced, to provide a device which uses it, and to provide a method for manufacturing the element. SOLUTION: In the optical-to-electrical transducer element, an n-type microcrystal silicon layer 4, an amorphous silicon layer 11, an intrinsic microcrystal silicon layer 12 and a p-type microcrystal silicon layer 16 are laminated sequentially on a substrate 1. The silicon layer 11 is made thin in such a way that, after it is deposited, its surface is dry-etched and treated.</p> |
