FILTER MEDIUM, FILTER AND AIR SUPPLYING EQUIPMENT WITH FILTER AND CHEMICAL SUPPLYING EQUIPMENT

摘要

PURPOSE: A filter medium, filter and air supplying equipment with filter and chemical supplying equipment is provided, which can extend filtering area by enlarging folding numbers of the filter media thus increasing filtering efficiency. It can be used at semi conductor producing plant by efficiencies of 99.99 % for particles of 0.12-0.17 μm in diameter and of 99.97 % for that of 0.3 μm in diameter as a HEPA filter, so that non-conforming articles are minimized. CONSTITUTION: The filter medium is composed of a sheet that consists of a first pleat part(100) and a second pleat part(120). The first pleat part(100) is formed by folding in a type having first amplitude(H1) and first wave length, and the second pleat part(120) is formed by folding in a type having second amplitude(H2) and second wave length. The second pleat part(120) comprises No. n pleat part that is formed in a type that have No. n amplitude and No. n wave length which are smaller than No. (n-1) amplitude and No. (n-1) wave length, which are the sheet folded by n times (where n is natural number). The filter media is set in a case of 550-650 mm in width, 600-1300 mm in length and 70-300 mm in height, and is made of glass fiber to filter particles contained in air composed.