| 摘要 |
PROBLEM TO BE SOLVED: To provide substrate treatment equipment wherein assembling work can be performed simply. SOLUTION: A thermal treatment block 30 and a liquid treatment block 10 are transported being mutually isolated, the thermal treatment block 30 is connected with a part on the liquid treatment block 10 in a factory or the like to which the blocks are transported, and the substrate treatment equipment is assembled. At this time, connectors 35 for power which are branched and connected with a plurality of thermal treatment units in the thermal treatment block 30 are connected with connectors 19 for power which are linked with a power source of the liquid treatment block 10, so that the respective thermal treatment units can be connected with the power source. As a result, assembling work of the substrate treatment equipment can be performed simply, since power connection of all the thermal treatment units can be performed by a little connection work.
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