| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a semiconductor measuring apparatus capable of conducting a correct measurement by keeping a wafer stage at a room temperature during the measurement. SOLUTION: The semiconductor measuring apparatus is one form conducting a probe test for a semiconductor wafer, and includes a stage on which the semiconductor wafer is places, a probe card arranged above the stage 4, a suction hole 9 formed in the stage 4, a suction fan that is provided near the suction hole 9 and sucks the air of the outside of the apparatus, an X-Y drive for moving the stage 4, a wafer supply for supplying the semiconductor wafer to the stage 4, a control unit for controlling the wafer supply and the X-Y drive 5, and a discharge fan that is provided in the control unit and discharges heat generated in the control unit. The suction hole 9 communicates with a vacuum mechanism through the inside of the stage 4.</p> |
