| 摘要 |
PROBLEM TO BE SOLVED: To provide an illuminating device that easily calibrates the measurement system of output light from an excimer laser, accurately measures the quantity of light, and accurately controls the amount of exposure, and to provide a projection aligner using the illuminating device. SOLUTION: There are provided a polarization separation means, a P-polarization detection means, an S-polarization detection means, an optical system, and a control means in the aligner. In the polarization separation means, P-, and S-polarization components are separated from one of luminous fluxes that is separated by a luminous flux separation means provided in the light path of the luminous flux that is radiated from a light source. In the P-polarization detection means, the P-polarization component that is separated by the polarization separation means is detected. In the S- polarization detection means, the S-polarization component is detected. In the optical system, a specific surface is illuminated by the other luminous flux that is separated by the luminous flux separation means. In the control means, a coefficient for correcting polarization characteristics in an optical system is obtained by a signal obtained by both the detection means when the polarization state of the polarization light entering the P- and S-polarization detection means is changed, the intensity of light entering the specific surface is obtained, and the output of the light source is subjected to drive control.
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