| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a photoelectric conversion semiconductor device capable of mounting various sizes of photoelectric conversion semiconductor elements on a coplanar substrate. SOLUTION: The photoelectric conversion semiconductor device is provided with the photoelectric conversion semiconductor element 1, the coplanar substrate 2 and an impedance matching terminal resistance 3. A signal line 4 and ground lines 5a and 5b are formed in the coplanar substrate 2. The signal line 4 is provided with extending parts having respectively a relatively large width 44a and a small width 44b. A relatively large gap part 10a and a small gap part 10b exist in gaps between the signal line 4 and the ground lines 5a and 5b as well.</p> |
