| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure of a reflux fan for an excimer laser system, which does not have its magnetic bearing, position sensor, etc., exposed directly to a fluorine gas atmosphere without using a metal pipe. SOLUTION: A chamber 1 is filled with a laser gas and the fan fitted to a rotary shaft 2 rotates in the chamber 1. On both sides of the chamber 1, radial electromagnets 5 and 9 sealed from the rotary shaft 2 with a seal member 59 having anticorrosiveness against the laser gas and position detection sensors 6 and 10 sealed between the rotary shaft 2 and a sensor unit 64 with partition wall 65 having anticorrosiveness against the laser gas; and the rotary shaft 2 is floated and the fan 3 rotates with the driving force of a motor stator 11. |
