发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device that prevents damage to a gate insulating film, easily controls a threshold, and achieves sufficiently low resistance in a gate electrode, and to provide a method for manufacturing the semiconductor device. SOLUTION: An N-type impurity region (source/drain region) 13 is formed on a P-type semiconductor substrate 11 separated by a channel region 12. A gate oxide film 14 is formed on the channel region 12. A polysilicon layer 15 is formed on the gate oxide film 14 while the polysilicon layer 15 has only a specific thickness and at the same time forms the sidewall of the gate electrode. A metal layer 16 is formed at the center section of a lamination electrode so that the metal layer 16 is held by the polysilicon layer 15.
申请公布号 JP2002198527(A) 申请公布日期 2002.07.12
申请号 JP20000397987 申请日期 2000.12.27
申请人 SEIKO EPSON CORP 发明人 KATO KOJI
分类号 H01L21/28;H01L29/423;H01L29/43;H01L29/49;H01L29/78;(IPC1-7):H01L29/78 主分类号 H01L21/28
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