| 摘要 |
PROBLEM TO BE SOLVED: To provide a linear motor apparatus, capable of minimizing residual in position control, while restraining excess power consumption and heat generation. SOLUTION: In a linear motor 100 of a stage apparatus 20, a plurality of coils 111 and so on are disposed on stator 110 side. Coil change-over switching parts 28U, 28V, 28W, having a plurality of switches S01 to S39, are disposed between the coils 111 and the like and a control part 200 of a controller 26. The controller 26 performs on/off control for the switches S01 to S39 by the coil change-over switching parts 28U, 28V, 28W, according to the drive conditions (e.g., drive control time elapsed (t), stage position X, current value I, acceleration α) of a wafer stage 30 (movable piece 110). |
