Structure equipped with electrical contacts formed through the substrate of this structure and process for obtaining such a structure

摘要

Structure equipped with electrical contacts formed through the substrate of this structure and the process for obtaining such a structure. According to the invention, the structure to be equipped with at least one electrical contact is formed in a layer (24) on the front side of the structure. This layer is formed on a substrate (20) which is pierced with at least one hole (28), exposing the rear side of the layer. The contact (32) is formed on it facing the hole in a cavity overhung by the edge of the hole closest to the first layer, this overhang allowing for electrical insulation of the substrate contact. Application to acceleration meters, pressure sensors and actuators. FIG. 6.