METHOD OF ETCHING LIQUID CRYSTAL DISPLAY

摘要

PURPOSE: A method of etching a liquid crystal display is provided to wet-etch a low-resistance metal layer to form a metal line of a liquid crystal display. CONSTITUTION: A trilevel-layer of Mo/AlNd/Mo and a bilevel-layer of AlNd/Mo are etched through one of spray and dip modes. The etch is carried out using etchant including H3PO4 of 60-90wt%, Ch3CooH of 0-30wt%, HNO3 of 0-20wt% and H2O of 0-25wt%. The etch is performed in a bath at the normal temperature to 50 degrees centigrade.