DEVICE FOR MANUFACTURING ORGANIC ELECTRO-LUMINESCENT DISPLAY

摘要

PURPOSE: A device for manufacturing organic EL(Electro-Luminescent) display is provided to simplify a manufacturing process as a whole by performing an inline process of an insulation film and a cathode separation sidewall. CONSTITUTION: A metal chamber forms a metal electrode layer. A first and a second organic chamber form an organic layer. A glove box performs a protection/sealing process. A vacuum chamber performs an inline process of an insulation film and a cathode separation sidewall. The vacuum chamber includes a frozen target substrate(52), a UV(Ultraviolet) exposer(50), a glass substrate(56), a metal mask(60) which corresponds to the insulation film and the cathode separation sidewall, and a hot stage(62) which evaporates a volatile solvent.