Polyetherketonzusammensetzungen und Träger zur Bearbeitung und Behandlung von Halbleiterscheiben

摘要

A polyetherketone resin composition comprising 5 - 100 parts by weight of carbon fibers having an average fiber diameter of 5 - 20 mu m and an average fiber length of 30 - 500 mu m per 100 parts by weight of a composition comprising 95 - 50 % by weight of a polyetherketone and 5 - 50 % by weight of a liquid crystal polyester, and a carrier for processing or treating a semi-conductor wafer molded from the above polyetherketone resin composition. Said composition is excellent in molding properties and said carrier is excellent in stiffness, dimensional stability and antistatic properties. The above liquid crystal polyester includes, for example, those consisting of repeating structural units (I), (II), (III) and (IV), shown below, in a molar ratio (II)/(I) of 0.2 - 1.0, a molar ratio Ä(III)+(IV)Ü/(II) of 0.9 - 1.1 and a molar ratio (IV)/(III) of 0 - 1.0.